JPH027646Y2 - - Google Patents

Info

Publication number
JPH027646Y2
JPH027646Y2 JP10907384U JP10907384U JPH027646Y2 JP H027646 Y2 JPH027646 Y2 JP H027646Y2 JP 10907384 U JP10907384 U JP 10907384U JP 10907384 U JP10907384 U JP 10907384U JP H027646 Y2 JPH027646 Y2 JP H027646Y2
Authority
JP
Japan
Prior art keywords
storage chamber
injection
plasma
plasma processing
processing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10907384U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6125972U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10907384U priority Critical patent/JPS6125972U/ja
Priority to CA000483614A priority patent/CA1249926A/en
Priority to DE19853520924 priority patent/DE3520924A1/de
Priority to AU43492/85A priority patent/AU565026B2/en
Priority to US06/744,061 priority patent/US4668479A/en
Publication of JPS6125972U publication Critical patent/JPS6125972U/ja
Application granted granted Critical
Publication of JPH027646Y2 publication Critical patent/JPH027646Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Nozzles (AREA)
JP10907384U 1984-06-12 1984-07-19 プラズマ処理装置 Granted JPS6125972U (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP10907384U JPS6125972U (ja) 1984-07-19 1984-07-19 プラズマ処理装置
CA000483614A CA1249926A (en) 1984-06-12 1985-06-11 Plasma processing apparatus
DE19853520924 DE3520924A1 (de) 1984-06-12 1985-06-11 Plasmaverfahrensanlage
AU43492/85A AU565026B2 (en) 1984-06-12 1985-06-12 Plasma processing
US06/744,061 US4668479A (en) 1984-06-12 1985-06-12 Plasma processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10907384U JPS6125972U (ja) 1984-07-19 1984-07-19 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS6125972U JPS6125972U (ja) 1986-02-15
JPH027646Y2 true JPH027646Y2 (en]) 1990-02-23

Family

ID=30668240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10907384U Granted JPS6125972U (ja) 1984-06-12 1984-07-19 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS6125972U (en])

Also Published As

Publication number Publication date
JPS6125972U (ja) 1986-02-15

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